PURPOSE: To inexpensively provide the liquid crystal display device having TFTs for driving picture elements and TFTs for driving a display part on the same substrate.
CONSTITUTION: The TFTs 107 for driving the picture elements of the liquid crystal display device having a display part 102, a scanning line driving part 103 and signal line driving part 104 on a glass substrate 101 are a-Si TFTs and the TFTs for driving the picture element to drive the scanning lines and signal lines are constituted as p-Si TFTs or c-Si TFTs formed by subjecting a-Si TFTs to a heating and annealing treatment. The production of the a-Si TFTs is easy and field effect mobility is excellent in the p-Si TFTs and the c-Si TFTs. These TFTs are formed by the same production process on the same substrate by effectively utilizing the advantages of the respective performances, by which the inexpensive active matrix display device having the high performance is obtd.
KONDO NAOFUMI
OKAMOTO MASAYA
NAKAZAWA KIYOSHI
MIYANOCHI MAKOTO
KATAOKA YOSHIHARU
