ACTIVE MATRIX SUBSTRATE

Japanese Patent JP3801271

B2

PROBLEM TO BE SOLVED: To improve mechanical and physical properties in a high-temperature region by coating a composition containting fluororesin soluble in a solvent and having a hydrophilic functional group in the molecule and a partial hydrolysis condensate of a specific alkoxysilane as an insulation film under pixel electrode of an active matrix substrate. SOLUTION: A coating film made of a coating composition containing a fluororesin soluble in a solvent and having a hydrophilic functional group in a molecule, and a partial hydrolysis condensate of alkoxysilane expressed by a formula R1mR2nSi (OR3)4-m-4(R1 and R2 are non-hydrolysis groups, R3 is an alkyl group, m and n are integers from 0 to 3 satisfying 0≤m+n≤3) are applied as an insulation film under pixel electrode 5. By doing so, mechanical and physical properties can be considerably improved, and uniform coating can be achieved with a high reliability when exposed to high temperature.