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Patent Searching and Data


Title:
ACTIVE TYPE VIBRATION CONTROL DEVICE
Document Type and Number:
Japanese Patent JPH10169702
Kind Code:
A
Abstract:

To provide an active, vibration control device which can prevent an acceleration sensor from breaking or a vibration control bed from greatly quaking.

In an active type vibration control device, the disturbance-caused vibration of a vibration control bed 1, on which an optical measuring instrument 4 as an object to be mounted is mounted, is detected by a servo-type acceleration sensor 5, and, based on the values detected, the vibration control bed 1 is controlled so as to restrict the vibration actively. In this case, both a P-wave detecting device 7 as a foreseeing means, which foresees the disturbance before excessive disturbance acts on the vibration control bed 1, and a fixing means, which stops the driving by the active, vibration restricting means, based on the signal from the P-wave detecting device 7 and moreover fixes the vibration control bed 1, are provided.


Inventors:
OZAKI TAKASHI
Application Number:
JP34671196A
Publication Date:
June 26, 1998
Filing Date:
December 10, 1996
Export Citation:
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Assignee:
NIKON CORP
International Classes:
F16F15/02; G05D19/02; (IPC1-7): F16F15/02; G05D19/02
Attorney, Agent or Firm:
Hiroshi Sano