To reduce the number of sensors and actuators, and to highly control horizontal three degrees of freedom, independent from one another, laying the detecting directions of horizontal sensors and manipulation generating directions of horizontal actuators with point-symmetry so as to be urged by a predetermined angle with respect to straight lines connecting between the horizontal center point of an object to be controlled, and the four corners.
Horizontal vibration or displacement of a control objected 11 to eliminate vibration from is detected by horizontal vibration sensors 1', 2', 3', 4' or horizontal displacement sensors 1", 2", 3", 4", and degrees (u) of horizontal manipulation are delivered to a plurality of horizontal actuators 1, 2, 3, 4 through a control system 5 in accordance with thus detected degrees r. Further, the detecting directions of the sensors 1' to 4' and 1" to 4" and manipulation generating directions of the actuators 1 to 4 are laid with point- symmetry, being urged by a predetermined angle with respect to straight lines connecting between the horizontal center point of the object 11 to be vibration-isolated, and four corners thereof. With this arrangement, horizontal three degrees of freedom can be enhanced by the horizontal sensors 1' to 4' and 1" to 4" and the horizontal actuators 1 to 4 in small numbers.
HIRABAYASHI KENICHI