PURPOSE: To improve the responsive characteristics of the vibration isolation control system of a subject to be controlled which is supported by an air spring.
CONSTITUTION: A vibration sensor 13 which is mounted on a subject 12 to be controlled which is supported by an air spring 11 and outputs the vibration signal S1 by detecting the vibration is provided, and the vibration control system is formed by an electric-pneumatic pressure analog valve 30 which is driven by the acceleration signal D1, the velocity signal D2, and the signal D3 to be generated by differentiating the acceleration signal and adjusts the pneumatic pressure of the air spring. This constitution eliminates the delay due to the acceleration signal of the vibration isolation control system, improves the responsive characteristics and the vibration isolation performance thereby.
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UCHIDA KIMIO