Title:
アクティブ除振装置およびアクティブ除振方法
Document Type and Number:
Japanese Patent JP4078330
Kind Code:
B2
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Inventors:
Yuan Yue Ishii
Hideaki Harada
Keisuke Sasashima
Jun Hirai
Seiji Ozeki
Ichito back door
Hisanori Abiru
Hideaki Harada
Keisuke Sasashima
Jun Hirai
Seiji Ozeki
Ichito back door
Hisanori Abiru
Application Number:
JP2004131746A
Publication Date:
April 23, 2008
Filing Date:
April 27, 2004
Export Citation:
Assignee:
MITSUBISHI HEAVY INDUSTRIES,LTD.
Showa Science Co., Ltd.
Ichito back door
Showa Science Co., Ltd.
Ichito back door
International Classes:
F16F15/02; G05D19/02; H01L21/027
Domestic Patent References:
| JP2001027280A | ||||
| JP11194066A | ||||
| JP9177873A | ||||
| JP8171403A | ||||
| JP2003021190A | ||||
| JP2001020996A |
Attorney, Agent or Firm:
Noriharu Fujita
Kunio Ueda
Kunio Ueda