To lower the sensitivity of the response of a vibration control system to mechanical resonance without deteriorating the response of the vibration control system.

The active vibration removing device equipped with interference elimination control systems 4, 5, 6, and 8 by operation modes which damp the vibration of a vibration removing base, and feedforward means 10 and 11 which apply feedforward signals for canceling a shake of the vibration removing base due to a reaction force accompanying the high-speed positioning or high- speed scanning of a stage to the said control systems according to pieces of position information from position measuring means LA-X, LA-Y, and LA-θ measuring the position of the stage is provided with a filter 7 for lowering the sensitivity to mechanical resonance generated by the application of the feedforward signals in front of a driver 9 which drives electromagnetic actuators LM-Z1, LM-Z2, LM-Z3, LM-X1, LM-Y2, and LM-Y3 applying driving forces to the vibration removing base, or on the supply path of the feedforward signals, the path of a driving signal after distribution, or the supply path of the feedforward signals applied to the said path.