To reduce the deterioration of control performance, by operating thrust, to be commanded to an actuator from the output, through measuring a position from a desired reference point, and thrust, to be added to a command value, through operating force generated by a supporting means from detecting output for the relative position between a vibration resistant mount and a floor.
A vibration resistant mount 1 is vertically supported at three points, by three supporting means 2 having a spring factor and a viscous damping factor; to nearly conform the weight gravity center of the mount 1 and a triangular gravity center position, formed by the supporting means 2, thereby making a triangle into a nearly isosceles triangle. An actuator 3 for applying desired thrust, a detecting means 9 for the relative position between the vibration resistant mount 1 and a floor, and a position detecting means 6 from a desired reference point are provided on the vibration resistant mount 1, to operate thrust, commanded to the actuator 3 from the output of a position detecting means 6, by a controlling means 5, to operate force, generated by the controlling means 2 from the output of the detecting means 9, thereby operating the thrust, to be added to the commanding value of the actuator 3, by a compensating means 10. This can reduce the deterioration of control performance.
MAYAMA TAKEHIKO