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Title:
ACTIVE VIBRATION RESISTANT DEVICE
Document Type and Number:
Japanese Patent JPH09250592
Kind Code:
A
Abstract:

To reduce the deterioration of control performance, by operating thrust, to be commanded to an actuator from the output, through measuring a position from a desired reference point, and thrust, to be added to a command value, through operating force generated by a supporting means from detecting output for the relative position between a vibration resistant mount and a floor.

A vibration resistant mount 1 is vertically supported at three points, by three supporting means 2 having a spring factor and a viscous damping factor; to nearly conform the weight gravity center of the mount 1 and a triangular gravity center position, formed by the supporting means 2, thereby making a triangle into a nearly isosceles triangle. An actuator 3 for applying desired thrust, a detecting means 9 for the relative position between the vibration resistant mount 1 and a floor, and a position detecting means 6 from a desired reference point are provided on the vibration resistant mount 1, to operate thrust, commanded to the actuator 3 from the output of a position detecting means 6, by a controlling means 5, to operate force, generated by the controlling means 2 from the output of the detecting means 9, thereby operating the thrust, to be added to the commanding value of the actuator 3, by a compensating means 10. This can reduce the deterioration of control performance.


Inventors:
ITO KOJI
MAYAMA TAKEHIKO
Application Number:
JP8706096A
Publication Date:
September 22, 1997
Filing Date:
March 18, 1996
Export Citation:
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Assignee:
CANON KK
International Classes:
F16F15/02; G05D19/02; H01L21/027; (IPC1-7): F16F15/02; G05D19/02; H01L21/027
Attorney, Agent or Firm:
Tetsuya Ito (1 outside)



 
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