To improve transmission characteristics of the vibration from a foundation which is installed.

The vibration of a vibration resistant base 31 supported by a support mechanism 32 is detected by a first vibration detection means 34 in a vibration removing base vibration feedback loop, and the vibration information obtained by amplifying by an amplifier 40 and then passing only necessary frequency band by a band-pass filter 41 is computed and processed by a feedback compensator 53 and is fed-back into an actuator 36 through a drive circuit 52. Moreover, in a floor vibration feed forward loop, the vibration of a foundation 33 which is installed is detected by a second vibration detection means 35, and the vibration information obtained by amplifying by an amplifier 46 and then passing only necessary frequency band by a band-pass filter 47 is digitalized by an A/D converter 48 and is converted into an analog signal by a D/A converter 50 as a feed forward control signal through a feed forward compensator 49 of an adaptive filter 44 so that the drive circuit 52 drives the actuator 36 by this signal.