To provide the actuator which is small in size, and can produce high generated force and the great quantity of displacement by supplying thermal energy to an operating element made of a shape memory alloy through self exothermic heat caused by energizing the operating element, and forming the operating element and a spring member into each laminated structure in a thin film shape respectively.
A flat support table 11 is prepared to form a microactuator into a layered structure. Each Ni-Ti alloy is formed by a spattering method as a thin film 13 for a shape memory alloy so as to be formed into a pattern. In order to form a bias spring 17 as a spring member, a film is formed out of photo-sensitive polyimide by a spin coating method so as to be formed into a pattern by exposing it to ultra-violet rays. An electric wiring 16 and the thin film 13 for a shape memory alloy are so desirable to be formed as in paired ones. By using the thin film 13 for a shape memory alloy as a power source, both high generated force and the great quantity of displacement in comparison with the constitution of the actuator can thereby be obtained simultaneously.
OKUBO KEIJI
KOMATSU KIYOSHI
| JPH07259725A | 1995-10-09 | |||
| JPH07274561A | 1995-10-20 | |||
| JPH07136956A | 1995-05-30 |
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