To miniaturize an actuator having a linear motor, a stage apparatus with the actuator and a shaft processing apparatus with the stage apparatus, and improve the movement accuracy.
The actuator 1 comprises the linear motor 6 having a fixed shaft 3 extending in the predetermined direction, a movable element 5 moving along the fixed shaft 3, a permanent magnet 4 disposed in one of the fixed shaft 3 and the movable element 5 and a coil 2 disposed in the other; a guide rail 7 extending in parallel with the fixed shaft 3 and tucking and guiding the movable element 5 in the inside; and a pair of support means 8 interposed between the guide rail 7 and the movable element 5, and movably supporting the movable element 5. The actuator 1, having the action point of a pair of the support means 8 and the center axis of the fixed shaft 3 coincide, is obtained.
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Tadashi Takahashi
Masakazu Aoyama