Title:
ACTUATOR SUBSTRATE FOR INKJET RECORDING HEAD AND ITS MANUFACTURING METHOD
Document Type and Number:
Japanese Patent JP2003246063
Kind Code:
A
Abstract:
To enhance size accuracies in X and Y directions of a substrate without bringing about characteristic deterioration and breaking of the actuator substrate for an inkjet recording head.
The actuator substrate comprising a stacking body 13 of a piezoelectric ceramics and a conductive material is held by a constraint sheet 14 constituted of a ceramics of the same composition as that of the piezoelectric ceramics and is baked.
Inventors:
HANDA SHINICHI
TAKAHASHI DAISUKE
TAKAHASHI DAISUKE
Application Number:
JP2002052422A
Publication Date:
September 02, 2003
Filing Date:
February 27, 2002
Export Citation:
Assignee:
KYOCERA CORP
International Classes:
B41J2/045; B41J2/055; B41J2/135; B41J2/14; B41J2/16; H01L41/083; H01L41/09; H01L41/22; H01L41/43; (IPC1-7): B41J2/045; B41J2/055; B41J2/16; H01L41/083; H01L41/09; H01L41/22