Title:
マイクロポンプ用アクチュエータおよびマイクロポンプ
Document Type and Number:
Japanese Patent JP5565195
Kind Code:
B2
Inventors:
Toshihiro Otake
Application Number:
JP2010182821A
Publication Date:
August 06, 2014
Filing Date:
August 18, 2010
Export Citation:
Assignee:
Seiko Epson Corporation
International Classes:
F04B9/00; B81B3/00; F04B43/08; H02N11/00
Domestic Patent References:
| JP2010175360A | ||||
| JP2012036133A |
Attorney, Agent or Firm:
Masahiko Ueyanagi
Osamu Suzawa
Kazuhiko Miyasaka
Osamu Suzawa
Kazuhiko Miyasaka