アクチュエータ、シャッタ装置、流体制御装置およびスイッチ

Japanese Patent JP7162305

B2

An actuator includes: an electrostatic actuation mechanism including a stationary electrode and a movable electrode; a first movable part driven by the electrostatic actuation mechanism; a first elastic support part that elastically supports the first movable part; an electret formed in at least one of the stationary electrode and the movable electrode; and a drive control unit that controls application of voltage to the electrostatic actuation mechanism. In the actuator a plurality of stable states are set in which the first movable part is positioned at a stable position at which an electrostatic force generated by the electret matches with an elastic force exerted by the first elastic support part or at a stable position near such stable position. By applying a voltage to the electrostatic actuation mechanism, the first movable part may be displaced from any stable position to another stable position.

Suzuki Masato
Akito Mori
Hashiguchi Hara
Tatsuhiko Sugiyama
Hiroshi Imamoto
Masatoshi Oba
Hiroyuki Miya
Hisayuki Ashizawa
Kazunori Ishibashi

JP2019151218A

October 28, 2022

August 21, 2019

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National University Corporation Shizuoka University
OMRON Corporation
Saginomiya Co., Ltd.

H02N13/00; B81B3/00; H01H59/00

JP2006311783A
JP53126147A
JP201327143A
JP2006353081A
JP2005335052A
JP201257692A
JP2011188182A
JP5272457A

Patent Attorney Tani / Abe Patent Office

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