Title:
Adhesive plate support member, plasma source and ion beam irradiation device
Document Type and Number:
Japanese Patent JP6307825
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a deposition preventive support member that can be exchanged easily, and to provide a plasma source including the same.SOLUTION: A deposition preventive support member F arranged in a plasma generation container 1 includes a first member 3 fixed to the inner wall of the plasma generation container, and a second member 4 fixed to the first member and having a protrusion protruding at least from the rim of the first member 3 in a direction along the inner wall surface of the plasma generation container 1, when viewing from a direction substantially perpendicular thereto. In the direction substantially perpendicular to the inner wall surface of the plasma generation container 1, the protrusion is separated from the inner wall surface of the plasma generation container 1.
Inventors:
Hiroshi Inuchi
Masahiro Tanii
Masahiro Tanii
Application Number:
JP2013197960A
Publication Date:
April 11, 2018
Filing Date:
September 25, 2013
Export Citation:
Assignee:
Nissin Ion Equipment Co., Ltd.
International Classes:
H01J37/08; C23C16/44; H01J27/08; H01J27/16; H01L21/31; H05H1/46
Domestic Patent References:
| JP2009140939A | ||||
| JP2013020737A | ||||
| JP2010251708A | ||||
| JP2003247057A |
Foreign References:
| US20120018402 | ||||
| US20040035364 | ||||
| US20030006008 |