Title:
ADSORPTION AND EXHAUST DEVICE FOR CHEMICAL LASER, AND METHOD FOR REGENERATING ADSORBENT THEREFOR
Document Type and Number:
Japanese Patent JP3949627
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a compact and lightweight adsorption and exhaust device for chemical laser which utilizes an adsorption and exhaust substance for an exhaust device, has a cooling means so as to ensure sufficient exhaust capacity in the applications, and obtains laser beam of high output, and is mounted on a mobile body, and a method for regenerating an adsorbent therefor.
SOLUTION: The adsorption and exhaust device for chemical laser exhausts gas from an oscillator 23 so as to drop the pressure at least in the oscillator 23 of a COIL (Chemical Oxygen Iodine Laser) generator, and comprises an adsorption and exhaust device 1 to adsorb and exhaust gas from the oscillator 23, and a cooling device 11 to cool the adsorption and exhaust device 1. Coagulating corrosive gas contained in the exhaust gas passing through an exhaust gas passage 25 interposed between the oscillator 23 and the adsorption and exhaust device 1 is coagulated and removed. To regenerate an adsorption panel 10 of the adsorption and exhaust device 1, a heater 12 and a roughing vacuum pump 13 are provided to shorten the time required for regeneration.
Inventors:
Ikuo Kazuhito
Hiroki Nagaoka
Eiichiro Muto
Shinji Furuya
Terashima
Ohashi Ichimichi
Hiroki Nagaoka
Eiichiro Muto
Shinji Furuya
Terashima
Ohashi Ichimichi
Application Number:
JP2003304836A
Publication Date:
July 25, 2007
Filing Date:
August 28, 2003
Export Citation:
Assignee:
Kawasaki Heavy Industries, Ltd.
ULVAC, Inc.
ULVAC, Inc.
International Classes:
B01D53/68; B01D51/00; H01S3/0951; (IPC1-7): B01D53/68; B01D51/00; H01S3/0951
Domestic Patent References:
| JP51084588A |
Attorney, Agent or Firm:
Yoshihiro Tsunoda
Yasu Furukawa
Toshio Nishitani
Keiji width
Izumi Uchiyama
Yosuke Koreeda
Yasu Furukawa
Toshio Nishitani
Keiji width
Izumi Uchiyama
Yosuke Koreeda