Title:
真空アークプラズマ蒸着装置の先端防汚型着火装置
Document Type and Number:
Japanese Patent JP7082789
Kind Code:
B2
Abstract:
To provide a tip antifouling type ignition apparatus capable of comprising an ignition mechanism, which does not have a trigger electrode deposited on a cathode during plasma ignition and also can perform re-ignition over and over, with a simple structure at low cost in an easy-to-maintain state.SOLUTION: A tip antifouling type ignition apparatus of a vacuum arc plasma vapor deposition apparatus according to the present invention comprises: a cathode 3 as an evaporation source; a trigger electrode 5 which ignites an arc discharge when bringing a trigger electrode tip part 5a brought into contact with a cathode surface 3a of the cathode 3 and then pulling it away so as to discharge a cathode substance 9 and thus generate plasma; a rotary shaft 6 which rotates or reverses the trigger electrode 5 so as to achieve the contacting or pulling-away action; a dark field space 13 that the discharged cathode substance 9 never reaches directly; and an antifouling mechanism which reverses the trigger electrode 5 not in ignition and thus makes the trigger electrode tip part 5a stand by in the dark field space 13, so that the cathode substance 9 does not reach the trigger electrode tip part 5a directly.SELECTED DRAWING: Figure 1
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Inventors:
Makoto Taki
Application Number:
JP2017249421A
Publication Date:
June 09, 2022
Filing Date:
December 26, 2017
Export Citation:
Assignee:
Onward Giken Co., Ltd.
International Classes:
C23C14/32; C23C14/24; H05H1/48
Domestic Patent References:
| JP6231709A | ||||
| JP10505633A | ||||
| JP2001521065A |
Attorney, Agent or Firm:
Miki Hisami