To provide an Ag alloy film for shielding an electromagnetic wave, which shows superior abrasion resistance and weathering resistance, and has superior visible light transparency and shielding properties for the electromagnetic wave, by suppressing coagulation of Ag, to provide a body coated with the Ag alloy film, and to provide a sputtering target for manufacturing the Ag alloy film.
The Ag alloy film for shielding the electromagnetic wave superior in Ag coagulation resistance, is comprised of an Ag-based alloy containing at least one element selected from the group consisting of Sc, Y and a rare-earth element. The sputtering target of the Ag alloy for shielding the electromagnetic wave is comprised of the Ag-based alloy containing at least one element selected from the group consisting of Sc, Y and the rare-earth element.
TSUBOTA TAKAYUKI
NAKAI JUNICHI
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