Title:
Ag ALLOY FILM
Document Type and Number:
Japanese Patent JP2023132922
Kind Code:
A
Abstract:
To provide an Ag alloy film with a high reflectivity and an excellent heat resistance.SOLUTION: An Ag alloy film is composed of an Ag alloy containing a total of 0.1 atom% or more types of an additive element selected from a metal element and a metalloid element. A diffraction peak intensity I (111) of an Ag (111) position and a diffraction peak intensity I (200) of an Ag (200) position are obtained for a film heat-treated after a film deposition in a θ/2θ measurement of an X-ray diffraction and a ratio of I(111)/I(200) is 10 or more. The Ag alloy film is preferably constituted by an Ag alloy containing a total of 0.5 atom % or more and 4.0 atom % or less of one or two types of additive elements selected from Ga, Ge.SELECTED DRAWING: None
Inventors:
TOSHIMORI YUTO
NONAKA SOHEI
NONAKA SOHEI
Application Number:
JP2022038520A
Publication Date:
September 22, 2023
Filing Date:
March 11, 2022
Export Citation:
Assignee:
MITSUBISHI MATERIALS CORP
International Classes:
C23C14/14; C23C14/34
Attorney, Agent or Firm:
Yasushi Matsunuma
Mitsuo Teramoto
Fumihiro Hosokawa
Onami Kazunori
Mitsuo Teramoto
Fumihiro Hosokawa
Onami Kazunori