Title:
フラットパネルディスプレイ用Ag基合金配線電極膜およびAg基合金スパッタリングターゲット、並びにフラットパネルディスプレイ
Document Type and Number:
Japanese Patent JP4264397
Kind Code:
B2
Inventors:
Takagi Katsutoshi
Tomihisa Katsufumi
Kugimiya Toshihiro
Junichi Nakai
Tomihisa Katsufumi
Kugimiya Toshihiro
Junichi Nakai
Application Number:
JP2004257632A
Publication Date:
May 13, 2009
Filing Date:
September 03, 2004
Export Citation:
Assignee:
KABUSHIKI KAISHA KOBE SEIKO SHO
International Classes:
C22C5/06; C23C14/34; G02F1/1343; G09F9/30; H01L21/28; H01L21/285; H01L21/3205; H01L23/52; H01L29/786
Domestic Patent References:
| JP9143680A | ||||
| JP2004139712A |
Attorney, Agent or Firm:
Kyuichi Ueki
Tadashi Sugakawa
Osamu Futakuchi
Hiroaki Ito
Tadashi Sugakawa
Osamu Futakuchi
Hiroaki Ito
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