To provide an air supply method for a polishing jig, reducing a manufacturing cost of an air injection device, while keeping high sealability.
The method includes a connection step to insert an injection port member 4 having a sealing member 34 into an air injection port 16, and an air supply step to discharge air from an air outlet 36. The injection port member 4 is provided with a peripheral wall 42, and an annular groove 41 having first and second side walls 43 and 44. The sealing member 34 comprises an O-ring, and is inserted into the annular ring 41. After the connection step, a gap S2 is formed between the sealing member 34 and the peripheral wall 42, a gap S1 is formed between the first side wall 43 and the sealing member 34, and the sealing member 34 comes into contact with the second side wall 44. The air supply step includes a pressing step to bias the sealing member 34 radially outside by an air pressure and press an outer peripheral part of the sealing member 34 to a wall surface 16a of the air injection port 16.
TAJIMA MAKOTO
KATAGIRI KAZUHIKO
Shigeki Yamakawa
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