Title:
AIR SHOWERING DEVICE
Document Type and Number:
Japanese Patent JP3950699
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To prevent dust from flowing into an air showering chamber from the outside in the showering chamber in an air showering device.
SOLUTION: Between a body unit and the door frame, etc., of a structure or each of a plurality of body units, air passages leading to the body unit are formed, and the air showering device is fixed to the door frame, etc., of the structure, or auxiliary units are provided to connect each of the body units. In such constitution, through the air passages of the auxiliary units, the air flowing from gaps between the body units and the auxiliary units is lead to side of the fans and the filters of the body units.
More Like This:
Inventors:
Murao point
Application Number:
JP2002032553A
Publication Date:
August 01, 2007
Filing Date:
February 08, 2002
Export Citation:
Assignee:
Hitachi Industrial Equipment Systems Co., Ltd.
International Classes:
F24F7/06; F24F9/00; (IPC1-7): F24F7/06; F24F9/00
Domestic Patent References:
| JP2006934U |
Attorney, Agent or Firm:
Polaire Patent Business Corporation
Katsuo Ogawa
Katsuo Ogawa
Previous Patent: SEMICONDUCTOR EXPOSURE DEVICE AND LOAD LOCK CHAMBER EMPLOYED THEREFOR
Next Patent: METHOD OF MANUFACTURING OPTICAL TRANSMISSION MODULE
Next Patent: METHOD OF MANUFACTURING OPTICAL TRANSMISSION MODULE