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Title:
AIR SPRING TYPE ACTIVE VIBRATION REMOVING DEVICE
Document Type and Number:
Japanese Patent JPH1144337
Kind Code:
A
Abstract:

To provide an active vibration removing device having a control system by constituting pressure feedback or weighted feedback against active supporting legs in which a pair of air spring actuators are opposed to each other.

Output of differential manometers 31D of active supporting legs 2a-2c are negatively fed back on the input side of PI compensators 27a-27c provided on the preceding stage of voltage/current converters 12a-12c carrying current to four-way valve type servo valves 30a-30c through gain compensators 32a-32c and related to pressure. On the part positions differential pressure input terminals 33a-33c designating differential pressure of a pair of air springs in the active supporting legs 2a-2c are provided, and the initial posture of a vibration removing base 1 is decided by their designations. Such pressure feedback is provided independent of the respective active supporting legs 2a-2c. In addition to this, acceleration feedback and positional feedback are constituted, and together with them non-interacting control based on a motion mode is constituted.


Inventors:
WAKUI SHINJI
KATO HIROAKI
Application Number:
JP21549297A
Publication Date:
February 16, 1999
Filing Date:
July 28, 1997
Export Citation:
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Assignee:
CANON KK
International Classes:
G03F7/22; F16F9/04; F16F15/02; F16F15/04; G05D19/02; (IPC1-7): F16F15/02; F16F9/04; F16F15/04; G03F7/22; G05D19/02
Domestic Patent References:
JPS4933483A1974-03-27
JPS54148214A1979-11-20
Attorney, Agent or Firm:
Tetsuya Ito (2 outside)