PURPOSE: To provide the subject dust-proof hood system composed of a dust- proof hood unit and an air-suction unit connected thereto, capable of extremely reducing generation of dust from an operator and capable of improving the yield of semiconductor products.
CONSTITUTION: To the inside of a hood body 1, a detachable air-suction unit 12 and an air-suction unit body 3 are attached and an exhaust hose 4 is connected to the air-outlet side of the above-mentioned air-suction unit body 3 to obtain the objective dust-proof hood system capable of preventing outflow of contaminated air due to pumping effect and expiration in breathing from hood-opening parts around the eyes when being worn and capable of discharging the air to other part. The above-mentioned air-suction unit body 3 is fixed to the west of the operator using a dust-proof belt 5.
CHO AKIO
MATONO MICHIAKI
