To precisely control the temperature of air to be supplied to a clean room.
Air 25 is moved through an inlet 11A to an air-conditioner 11. The temperature of the air 25 at a dry coil outlet 12B is measured by a thermometer 17 and the air 25 is passed through a low pass filter 33, and then an air temperature signal W1 is formed. The signal W1 is transmitted to a main loop PID computer 31. A main loop current value or controlled variable Z2 having a difference from an air temperature set value D1 is transmitted to a sub loop PID controller 32. The temperature of cold water to be supplied to a dry coil 12 is measured by a thermometer 18 to form a cold water temperature signal W2 which is transmitted to a computer 32. The computer 32 calculates a sub loop operation variable Z1 from the value and transmits it to a heater 15. In accordance with the result, the heater 15 precisely controls the temperature of the cold water to keep the temperature of the dry coil 12 constant. The temperature of the air 25 is set constant in heat exchange with the dry coil 12, and then the air 25 is supplied through the outlet 11B to the clean room.
COPYRIGHT: (C)2007,JPO&INPIT
GOTODA RYUSUKE
GAMO HIROYUKI
MIYAWAKI MASATAKA
HOSOKAWA YOSHITO
| JPH11173631A | 1999-07-02 | |||
| JP2001194040A | 2001-07-17 | |||
| JPH10292942A | 1998-11-04 | |||
| JP2004183999A | 2004-07-02 | |||
| JPH0510566A | 1993-01-19 |
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