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Title:
ALIGNER AND METHOD FOR MANUFACTURING DEVICE
Document Type and Number:
Japanese Patent JP2008166737
Kind Code:
A
Abstract:

To improve measurement accuracy in determined measurement conditions without performing an overlapping inspection.

An aligner is for exposing each of a plurality of regions disposed on a substrate. The stepper is provided with a measurement section, a processing section and a console. The measurement section acquires the image signal of alignment marks formed in the regions, and measures the positions of alignment marks based on the signal. The processing section allows the measurement section to measure the positions of the alignment marks each formed in at least a part of a plurality of the regions out of a plurality of the regions under a plurality of the measurement conditions, finds feature amount of the signal concerning the measurement conditions, and finds coefficients of the coordinate conversion formula that approximate the feature amounts using a formula that approximates the measured positions that are the coordinate conversion formula at designed positions of the alignment marks with regard to each of a plurality of the measurement conditions. The console displays the coefficients found with regard to each of a plurality of the measurement conditions.


Inventors:
EGASHIRA SHINICHI
Application Number:
JP2007306313A
Publication Date:
July 17, 2008
Filing Date:
November 27, 2007
Export Citation:
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Assignee:
CANON KK
International Classes:
H01L21/027; G03F9/00
Domestic Patent References:
JP2006108386A2006-04-20
JP2006216796A2006-08-17
JP2004087562A2004-03-18
JP2003203846A2003-07-18
JP2004117030A2004-04-15
JPH05335212A1993-12-17
JP2000173921A2000-06-23
JP2006108386A2006-04-20
JP2006216796A2006-08-17
JP2004087562A2004-03-18
JP2003203846A2003-07-18
JP2004117030A2004-04-15
JPH05335212A1993-12-17
JP2000173921A2000-06-23
Foreign References:
WO2000057126A12000-09-28
WO2000057126A12000-09-28
Attorney, Agent or Firm:
Yasunori Otsuka
Shiro Takayanagi
Yasuhiro Otsuka
Shuji Kimura
Osamu Shimoyama
Nagakawa Yukimitsu



 
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