Title:
ALIGNER AND METHOD OF MANUFACTURING DEVICE
Document Type and Number:
Japanese Patent JP2009290028
Kind Code:
A
Abstract:
To reduce downtime of an exposure system associated with exchange or the like of a phase adjustment optical element.
The exposure system 100 irradiates an original plate 6 by an illumination optical system 4 containing the phase adjustment optical element 2 which converts linearly polarized light to non-polarized light, and projects a pattern of the original plate 6 on a substrate 8 by a projection optical system 7 to expose the substrate 8. The exposure system 100 includes a changing mechanism 18 to change a passing region through which the linearly polarized light passes in the whole region of the phase adjustment optical element 2.
Inventors:
TOMINAGA YASUTERU
Application Number:
JP2008141676A
Publication Date:
December 10, 2009
Filing Date:
May 29, 2008
Export Citation:
Assignee:
CANON KK
International Classes:
H01L21/027; G02B5/30; G03F7/20
Attorney, Agent or Firm:
Yasunori Otsuka
Shiro Takayanagi
Yasuhiro Otsuka
Shuji Kimura
Osamu Shimoyama
Nagakawa Yukimitsu
Shiro Takayanagi
Yasuhiro Otsuka
Shuji Kimura
Osamu Shimoyama
Nagakawa Yukimitsu
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