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Title:
ALIGNMENT METHOD AND DEVICE FOR ROLLER TRANSFER
Document Type and Number:
Japanese Patent JPH04112074
Kind Code:
A
Abstract:

PURPOSE: To transfer a transfer pattern on a work accurately and with high reproducibility by making the alignment of the work and the transfer pattern at every work by observing optically.

CONSTITUTION: A pattern side resistor mark provided on a transfer pattern 2 formed on a roller 1 and a work wide register mark provided on a work 4 laid on a work surface plate 3 are being observed by an observation optical system 5. The work surface plate 3 or the roller 1 is moved in accordance with information obtained from the observation optical system 5 so as to conform the superposing transfer pattern 2 to the work 4. After the alignment of the transfer pattern 2 and the work 4, the work surface plate 3 is moved so as to attach the work 4 to the transfer pattern 2 with pressure. The roller 1 is rotated in an attached state so that the transfer pattern 2 is transferred to the surface of the work 4. Accordingly, the transfer pattern 2 can be transferred on a predetermined position of the work 4 accurately and with a high reproducibility.


Inventors:
TAKEUCHI SATOSHI
ASAKA KENJI
Application Number:
JP23156390A
Publication Date:
April 14, 1992
Filing Date:
August 31, 1990
Export Citation:
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Assignee:
DAINIPPON PRINTING CO LTD
International Classes:
B41F33/14; B41F16/00; B41M3/00; C23F1/00; G03F9/00; H01L21/027; (IPC1-7): B41F16/00; B41F33/14; B41M3/00; C23F1/00; H01L21/027
Attorney, Agent or Firm:
Yasuo Ishikawa (2 outside)



 
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