Title:
アライメントステージ
Document Type and Number:
Japanese Patent JP6963796
Kind Code:
B2
Abstract:
To provide an alignment stage which is adapted for accurate and fine motion as a feeding mechanism part, while being capable of allowing large applied pressure during work processing.SOLUTION: An alignment stage 1A includes: a base 11, a table 12 disposed over the base 11; a work plate 13 which is supported by the table 12 and on which a work-piece W is mounted; and a feeding mechanism part 3 provided between the base 11 and the table 12 and supporting the table 12 movably with three degrees of freedom, which are an X-axis direction, a Y-axis direction, and a θ rotation direction, with respect to the base 11. The alignment stage 1A includes a reverse loading mechanism 2 for applying a load to the work plate 13 from below upwards when an applied pressure during processing is applied to the work-piece W placed on the work plate 13 from above.SELECTED DRAWING: Figure 4
Inventors:
Kenji Mochizuki
Takanori Uchida
Nobuhiro Matsuzaka
Takanori Uchida
Nobuhiro Matsuzaka
Application Number:
JP2017174616A
Publication Date:
November 10, 2021
Filing Date:
September 12, 2017
Export Citation:
Assignee:
Aiseru Co., Ltd.
International Classes:
H01L21/68; H01L21/027
Domestic Patent References:
| JP2007102198A | ||||
| JP11195578A |
Attorney, Agent or Firm:
Eiji Miyazaki
Tomohiro Harada
Tomohiro Harada