Title:
Alloy thin film generating device
Document Type and Number:
Japanese Patent JP6031725
Kind Code:
B2
Inventors:
Tomohiko Asai
Kaoru Suzuki
Nobuyuki Nishinomiya
Takao Mikio
Kaoru Suzuki
Nobuyuki Nishinomiya
Takao Mikio
Application Number:
JP2012195690A
Publication Date:
November 24, 2016
Filing Date:
September 06, 2012
Export Citation:
Assignee:
NIHON UNIVERSITY
International Classes:
C23C14/14; C23C14/22; C23C16/50
Domestic Patent References:
| JP2002327262A | ||||
| JP63223168A | ||||
| JP2007009303A | ||||
| JP6057419A | ||||
| JP10088335A | ||||
| JP201050090A | ||||
| JP2006310101A |
Attorney, Agent or Firm:
Ihei Ihei
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