Title:
感知素子のためのアルミナ拡散バリア
Document Type and Number:
Japanese Patent JP7185422
Kind Code:
B2
Abstract:
A sensing element for a temperature sensor including a base with a platinum meander applied thereto. An alumina diffusion barrier (ADB) covers the meander to provide protection against contamination and structural stabilization, wherein the alumina diffusion barrier is a contiguous polycrystalline layer fabricated from alumina and approximately 1% by weight of a rutile additive to be substantially devoid of network porosity. The contiguous polycrystalline layer includes grains with a typical grain size being in a range of 0.5-3 μm. A method for fabricating an alumina diffusion barrier includes the steps of: combining a nano-alumina and nano-rutile powder to create a formulation; applying the formulation to the platinum meander to form a layer; and sintering the layer to create a contiguous polycrystalline layer covering the platinum meander.
Inventors:
Petar Mitzeff
Radostina H Tsoneva
Nikolai K. Nikolov
Benny van Dale
Peter Tillmans
Christian Bates
Radostina H Tsoneva
Nikolai K. Nikolov
Benny van Dale
Peter Tillmans
Christian Bates
Application Number:
JP2018103655A
Publication Date:
December 07, 2022
Filing Date:
May 30, 2018
Export Citation:
Assignee:
Sensorta Technologies Incorporated
International Classes:
G01K7/18; G01K13/00; G01K13/024
Domestic Patent References:
| JP200985952A | ||||
| JP20141116A | ||||
| JP9145489A | ||||
| JP917608A | ||||
| JP2000323174A | ||||
| JP5451879A | ||||
| JP920552A |
Attorney, Agent or Firm:
Kyozo Katayose