Title:
アルミニウム含有感光性樹脂組成物およびパターン形成方法
Document Type and Number:
Japanese Patent JP5287397
Kind Code:
B2
Inventors:
Okabe Shogo
Application Number:
JP2009066102A
Publication Date:
September 11, 2013
Filing Date:
March 18, 2009
Export Citation:
Assignee:
JSR CORPORATION
International Classes:
G03F7/004; C08F2/44; H01J9/02; H01J11/12; H01J11/22; H01J11/24; H01J11/26; H01J11/34; H01M14/00; H05K1/09
Domestic Patent References:
| JP10333322A | ||||
| JP2001163613A | ||||
| JP2292362A | ||||
| JP2009037232A | ||||
| JP2006086123A | ||||
| JP2004101850A |
Attorney, Agent or Firm:
Patent corporation ssinpat
Koji Makimura
Chihata Takahata
Koji Makimura
Chihata Takahata