Title:
ALUMINUM NITRIDE PRODUCTION DEVICE
Document Type and Number:
Japanese Patent JP2021148350
Kind Code:
A
Abstract:
To provide a production device, when aluminum nitride is produced by a combustion synthesis method using low-grade metallic aluminum, capable of reducing the influence of impurity components included in vaporized raw material and producing aluminum nitride powder with high purity on a level same as the case in which high purity metallic aluminum is used.SOLUTION: An aluminum nitride production device is used for synthesizing aluminum nitride by performing firing to raw material powder comprising metallic aluminum powder and propagating the nitriding combustion heat of the metallic aluminum powder to the whole of the raw material powder, and comprises a fixture for reaction made of an upper face-released container capable of receiving the raw material powder into a reaction container body made of a sealed container connected with a piping for feeding nitrogen, a firing apparatus for firing the raw material powder and a circulation mechanism circulating atmospheric gas in the reaction container body.SELECTED DRAWING: Figure 1
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Inventors:
YAMAMOTO YASUYUKI
Application Number:
JP2020047730A
Publication Date:
September 27, 2021
Filing Date:
March 18, 2020
Export Citation:
Assignee:
TOKUYAMA CORP
International Classes:
F27D7/04; C01B21/072; C04B35/581; F27D3/12
Attorney, Agent or Firm:
Patent corporation ssinpat