Title:
ALUMINUM OXIDE PARTICLE
Document Type and Number:
Japanese Patent JP2010265171
Kind Code:
A
Abstract:
To provide aluminum oxide particles having extremely small particle diameters and an extremely narrow distribution of particle diameters.
A collection of nanoparticles of aluminum oxide having a very narrow distribution of particle diameters are produced by laser pyrolysis. The distribution of particle diameters effectively does not have a tail and almost no particles having a diameter greater than about 4 times the average diameter. The pyrolysis is performed by pyrolyzing a molecular stream containing an aluminum precursor, an oxidizing agent and an infrared absorber.
COPYRIGHT: (C)2011,JPO&INPIT
Inventors:
KUMAR SUJEET
REITZ HARIKLIA DRIS
BI XIANGXIN
KAMBE NOBUYUKI
REITZ HARIKLIA DRIS
BI XIANGXIN
KAMBE NOBUYUKI
Application Number:
JP2010154669A
Publication Date:
November 25, 2010
Filing Date:
July 07, 2010
Export Citation:
Assignee:
NANOGRAM CORP
International Classes:
B24B37/00; C01F7/02; C01F7/30; C01F7/306; C09G1/02; C09K3/14; H01L21/304
Attorney, Agent or Firm:
Shinjiro Ono
Kazuo Shamoto
Yasushi Kobayashi
Akio Chiba
Hiroyuki Tomita
Hiroaki Noya
Kazuo Shamoto
Yasushi Kobayashi
Akio Chiba
Hiroyuki Tomita
Hiroaki Noya