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Title:
アモルファスケイ素含有膜の堆積
Document Type and Number:
Japanese Patent JP2005536054
Kind Code:
A
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Inventors:
Todd Michael A.
Application Number:
JP2004529111A
Publication Date:
November 24, 2005
Filing Date:
July 24, 2003
Export Citation:
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Assignee:
ASM America Inc.
International Classes:
C30B25/02; H01L21/20; H01L21/205; (IPC1-7): H01L21/20; H01L21/205
Domestic Patent References:
JPH01268064A1989-10-25
JP2000323689A2000-11-24
JPH10335496A1998-12-18
JPH10223913A1998-08-21
JPH0521378A1993-01-29
JPH0391239A1991-04-16
JPH08139032A1996-05-31
JPH0982651A1997-03-28
JPH0845838A1996-02-16
Attorney, Agent or Firm:
Eiji Saegusa
Kakehi Yuro
Kenji Saito



 
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