Title:
荷電粒子の分析
Document Type and Number:
Japanese Patent JP3830978
Kind Code:
B2
Abstract:
A detection device for analyzing charged particles. The charged particle analyzer comprises a source of charged particles and a charged particle detector spaced from the source and immersed within the source in an ionizable gas. The detector comprises at least one pair of electrodes, characterized in that the electrodes of the pair are spaced apart by a distance that is substantialy less than the spacing between the source and detector. The electrodes of the pair are maintained at different potentials, and the source is maintained at a potential different from the potentials of the electrodes. The potentials are selected such that charged particles emitted by the source are attracted from the source toward each of the pair of electrodes and such that charged particles adjacent the detector are accelerated to energies sufficient to ionize the gas.
Inventors:
Gareth Yee, Derbyshire
Bateman, Edmond Jay
Bateman, Edmond Jay
Application Number:
JP53544998A
Publication Date:
October 11, 2006
Filing Date:
February 03, 1998
Export Citation:
Assignee:
COUNCIL FOR THE CENTRAL LABORATORY OF THE RESEARCH COUNCILS
International Classes:
G01N23/227; H01J37/244; H01J47/06
Domestic Patent References:
| JP789148B2 | ||||
| JP6297250A | ||||
| JP1117258A | ||||
| JP8162060A | ||||
| JP2177243A | ||||
| JP1211852A | ||||
| JP210640A | ||||
| JP29430B2 | ||||
| JP6356596B2 | ||||
| JP2257557A | ||||
| JP225737A |
Foreign References:
| WO1996017373A1 |
Attorney, Agent or Firm:
Aoyama Aoi
Samejima Mutsumi
Genban Sanae
Samejima Mutsumi
Genban Sanae