多層材料の元素組成及び厚みの分析 - Thermoniton Analyzers Limited Liability Company

Title:

多層材料の元素組成及び厚みの分析

Document Type and Number:

Japanese Patent JP2009510479

Kind Code:

A

Abstract:

A method of verifying layer order in a multilayer stack uses data acquired by x-ray fluorescence. Verification is achieved by irradiating the stack with penetrating radiation and then measuring the intensities of fluoresced x-rays characteristic of an element known to be present in one of the layers of the stack. The intensity information thus obtained is used to determine the attenuation of the overlying layers and the areal density of the relevant element. The intensities of fluoresced x-rays characteristic of a different element known to be present in a second layer are then measured, and the experimentally-determined intensity ratio is compared to an expected intensity ratio, which is based on the anticipated attenuation by the first layer and layers overlying the first layer. If the experimentally-determined ratio matches the expected ratio, then a hypothesized order (second layer immediately underlying the first layer) is verified.

More Like This:

JP3224198	Insertion / extraction jig for sample container used in fluorescent X-ray analyzer and insertion / extraction jig set
WO/1980/001718	FIELD PORTABLE ELEMENT ANALYSIS UNIT
JP7009476	Methods and equipment for analyzing and treating hair

Inventors:

Grozins Lee

Application Number:

JP2008534666A

Publication Date:

March 12, 2009

Filing Date:

October 04, 2006

Export Citation:

Click for automatic bibliography generation Help