Title:
解析装置、解析方法および解析プログラム
Document Type and Number:
Japanese Patent JP7406017
Kind Code:
B2
Abstract:
In order to analyze a plurality of measured values obtained by measuring a device under measurement and to effectively use the analyzed information, there is provided a recording medium having recorded thereon an analysis apparatus, the analysis apparatus including: an acquisition unit configured to acquire the plurality of measured values obtained by measuring the device under measurement via a jig; an analysis unit configured to analyze the plurality of measured values to calculate variation data which indicates a variation of a measured value in accordance with the number of times of contacts that the jig comes into contact with the device under measurement; and a management unit configured to manage a state of the jig based on the variation data.
Inventors:
Yuji Sakai
Hajime Sugimura
Hajime Sugimura
Application Number:
JP2023010279A
Publication Date:
December 26, 2023
Filing Date:
January 26, 2023
Export Citation:
Assignee:
Advantest Corporation
International Classes:
H01L21/66; G01R31/26; G01R31/28
Domestic Patent References:
| JP2003282654A | ||||
| JP11295375A | ||||
| JP2008277769A | ||||
| JP200749020A |
Attorney, Agent or Firm:
Patent Attorney Corporation RYUKA International Patent Office
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