Title:
分析装置
Document Type and Number:
Japanese Patent JP5665305
Kind Code:
B2
Abstract:
An analysis apparatus for analyzing a gas by a terahertz wave or an infrared ray comprises a generator for generating the terahertz wave or the infrared ray; a trapping unit having a trapping film for trapping a gas and being placed to be capable of causing interaction between the gas trapped by the trapping film and the terahertz wave or infrared ray generated by the generator; and a detector for detecting the interaction of the gas with the terahertz wave or infrared ray; wherein the trapping unit comprises a structure for contact with a site evolving the gas; and the structure holds the trapping film separately from the site.
Inventors:
尾内 敏彦
武田 俊彦
武田 俊彦
Application Number:
JP2009265226A
Publication Date:
February 04, 2015
Filing Date:
November 20, 2009
Export Citation:
Assignee:
キヤノン株式会社
International Classes:
G01N21/35; G01N21/3504; G01N21/3586; G01N22/00
Attorney, Agent or Firm:
Takuma Abe
Kuroiwa 創吾
Kuroiwa 創吾
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