Title:
解析装置及び画像生成方法
Document Type and Number:
Japanese Patent JP7108527
Kind Code:
B2
Abstract:
An analysis device analyzes inspection results of an inspection object which includes inspection target devices having respective electrodes on which needle marks are formed. The analysis device includes a display part for displaying an image, and an image generation part for generating an image to be displayed on the display part. The image generation part generates an analysis image based on information on inspection results with respect to the needle marks. The analysis image includes a needle mark scatter plot image showing positions of the needle marks with respect to the electrodes in each inspection target device in an overlapped manner, an inspection object map image showing a surface of the inspection object and showing needle mark inspection results with respect to the inspection target devices, and a captured image of the electrodes. Display contents of the images are linked with each other.
Inventors:
Shin Uchida
Application Number:
JP2018230769A
Publication Date:
July 28, 2022
Filing Date:
December 10, 2018
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
H01L21/66; G01R31/28
Domestic Patent References:
| JP2009283796A | ||||
| JP2009239057A |
Attorney, Agent or Firm:
Kanemoto Tetsuo
Koji Hagiwara
Naoki Ogita
Takashi Saito
Takuya Mine
Koji Hagiwara
Naoki Ogita
Takashi Saito
Takuya Mine