To provide an analytical electron microscope capable of conducting efficiently element analysis of a plurality of analysis points of a specimen.
An electron beam 2 emitted from an electron source 1 passes through a condenser stop 3 and irradiates a specimen 12. The electron beam 2 transmitted by the specimen 12 is magnified by an objective lens and a plurality of focusing lenses 18, and an electron microscope image of the specimen 12 is formed on a fluorescent screen 13. Characteristic X-rays generated from the specimen 12 are detected and analyzed by an element analyzing device comprising an element analyzing detector 16 and an element analysis control device 17. Positions of specimen analysis points 1, 2 and spot size of the irradiated electron beam are previously memorized in an electron microscope control device 14 and, when analysis gets started, the memorized position and size information is read out, a first and a second analysis point and an electron beam size are automatically set up based on the information, and element analysis of the analysis points 1, 2 is automatically conducted.
ISAGOZAWA SHIGETO
SHIMOYAMA WATARU
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