PURPOSE: To calculate the depth of the analysis position of a sample and improve the precision of the analysis result by detecting the position in the sample front direction of a secondary energy beam generated by the radiation of a primary energy beam and measuring the time to detect the secondary energy beam.
CONSTITUTION: A primary energy beam 3 is radiated to a sample 1, particles constituting the sample 1 are emitted and ionized into secondary ions as a result of spattering on the surface. The secondary ions are accelerated vertically to the sample 1 toward a detecting means 5 by the electric field generated by an extracting electrode 4 to become a secondary ion beam 9. This beam 9 passes the magnetic field 7 before passing the means 5, only the element desired to be analyzed is fed to the means 5 by the magnetic field 7, other elements are separated to separate directions according to masses. The detection result by this means 5 is inputted to a control means 8, the concentration of the sample 1 at the point A is calculated based on the incidence quantity of the element X, the positions of the sample 1 in the surface direction from the arrival point C to the point A are calculated, and the depth of the analysis position is determined.
NONOGAMI HIROSHI
NAGAFUJI YOSHIO
SUZUKI IKUHISA
