Title:
ANGULAR VELOCITY SENSOR ELEMENT FOR BIAXIAL DETECTION
Document Type and Number:
Japanese Patent JP2012093153
Kind Code:
A
Abstract:
To provide an angular velocity sensor element for biaxial detection, that can detect an angular velocity in Y-axis and Z-axis.
An angular velocity sensor element for biaxial detection according to the present invention detects an angular velocity in Y-direction by vibration bodies 27, 31, 47, and 51 for Y-axis detection and an angular velocity in Z-direction by vibration bodies 34, 39, 54, and 59 for Z-axis detection so that an angular velocity in a biaxial direction, namely Y-axis and Z-axis can be detected.
Inventors:
NAKAJIMA KOICHIRO
UEDA SHINJIRO
AIZAWA HIROYUKI
FUJII TAKESHI
YAMAMOTO KENSAKU
UEDA SHINJIRO
AIZAWA HIROYUKI
FUJII TAKESHI
YAMAMOTO KENSAKU
Application Number:
JP2010239251A
Publication Date:
May 17, 2012
Filing Date:
October 26, 2010
Export Citation:
Assignee:
PANASONIC CORP
International Classes:
G01C19/56; G01C19/5621; G01C19/5628; H01L41/08; H01L41/09; H01L41/187; H01L41/22
Domestic Patent References:
| JP2008122262A | 2008-05-29 | |||
| JP2008191034A | 2008-08-21 | |||
| JP2008190887A | 2008-08-21 |
Attorney, Agent or Firm:
Hiroki Naito
Daisuke Nagano
Kentaro Fujii
Daisuke Nagano
Kentaro Fujii