Title:
アニール処理、装置及びシステム
Document Type and Number:
Japanese Patent JP4022619
Kind Code:
B2
More Like This:
Inventors:
Satoshi Ando
Atsushi Yamamoto
Mitsutoshi Matsushita
Yoshikawa Toshikazu
Atsushi Yamamoto
Mitsutoshi Matsushita
Yoshikawa Toshikazu
Application Number:
JP2002381085A
Publication Date:
December 19, 2007
Filing Date:
December 27, 2002
Export Citation:
Assignee:
Showa Vacuum Co., Ltd.
International Classes:
F27B5/05; F27D3/12; F27B5/02; F27B5/12; F27B5/13; F27B5/14; F27B5/16; F27B5/18; F27D13/00; F27D15/02; H03H3/02
Domestic Patent References:
| JP9275080A | ||||
| JP7137803A | ||||
| JP7012468A | ||||
| JP2000164526A | ||||
| JP4279875A | ||||
| JP2000274952A | ||||
| JP2002110576A | ||||
| JP2001267264A | ||||
| JP59098518A | ||||
| JP5152878A |
Attorney, Agent or Firm:
Masao Okabe
Nobuaki Kato
Kazuo
Shinichi Usui
Ikuo Fujino
Takao Ochi
Teruhisa Motomiya
Norimichi Takanashi
Asahi Shinmitsu
Seiichiro Takahashi
Koji Yoshizawa
Nobuaki Kato
Kazuo
Shinichi Usui
Ikuo Fujino
Takao Ochi
Teruhisa Motomiya
Norimichi Takanashi
Asahi Shinmitsu
Seiichiro Takahashi
Koji Yoshizawa