Title:
交換可能な先端部を有するアンテナ結合高周波（ＲＦ）プローブ
Document Type and Number:
Japanese Patent JP7062011
Kind Code:
B2
Abstract:
Described herein are antenna-coupled radio frequency (RF) probes with replaceable tips. In the described embodiments, test signals are coupled onto a probe tip wafer via an on-tip antenna, thus the probe tip is decoupled from the probe body. This allows for separate fabrication of the probe body and the probe tip. As such, the probe tip can be made available as a “commodity” and the user can simply replace a worn-out or damaged probe tip, providing significant savings in per-unit cost and operation cost of the new contact probes. The decoupling of probe tip and probe body allows for manual replacement of probe tip without the need for extremely accurate alignment which is typically required in extremely high frequency probes. Manual replacement of the tips is only possible due to the much less stringent alignment requirements afforded by the antenna coupling from the probe body to the probe tip.
Inventors:
Sertel, Kubirei
Application Number:
JP2019547230A
Publication Date:
May 02, 2022
Filing Date:
November 15, 2017
Export Citation:
Assignee:
Ohio State Innovation Foundation
International Classes:
H01Q19/06; H01P3/00; H01P3/02; H01P3/06; H01P3/08; H01P3/10; H01Q7/00; H01Q9/28; H01Q11/02; H01Q13/02; H01Q13/06; H01Q13/08; H01Q13/10; H01Q13/24; H01Q15/02; H01Q19/09; H01Q19/12; H01Q21/06
Domestic Patent References:
| JP2012531070A | ||||
| JP2013179668A |
Foreign References:
| US20150102225 | ||||
| US20130106456 |
Attorney, Agent or Firm:
Taro Yaguchi
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