Title:
アンテナ及びプラズマ成膜装置
Document Type and Number:
Japanese Patent JP7026498
Kind Code:
B2
Abstract:
An antenna includes a first waveguide configured to guide VHF radio frequency waves, and a second waveguide configured to guide the VHF radio frequency waves supplied from the first waveguide, the second waveguide having a pair of metal reflective plates therein facing each other across a longitudinal distance along the second waveguide, wherein a tip end of the first waveguide is coupled to the second waveguide at a sideways point thereof between the metal reflective plates, and wherein a distance between the metal reflective plates is λg/4+λg·n/2, λg being a wavelength of the VHF radio frequency waves in tube, and n being an integer greater than or equal to zero.
Inventors:
Taro Ikeda
Toshihiko Iwao
Toshihiko Iwao
Application Number:
JP2017237917A
Publication Date:
February 28, 2022
Filing Date:
December 12, 2017
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
H05H1/46; C23C16/505; H01L21/31
Domestic Patent References:
| JP2001351900A | ||||
| JP2006210929A | ||||
| JP2005051102A | ||||
| JP3287774A |
Foreign References:
| WO2013124906A1 | ||||
| US20120034136 |
Attorney, Agent or Firm:
Tadashige Ito
Tadahiko Ito
Tadahiko Ito