To provide an anti-reflection film having anti-reflection performance over a wide band from the ultraviolet region to the visible region, further to the infrared region.
Counted from the substrate side, a film with an intermediate refractive index material is formed on a first layer, a film with a high refractive index material is formed on a second and a fourth layers, a film with a low or intermediate refractive index material is formed on a third layer, and a film with a low refractive index material is formed on a fifth layer, respectively. The film thickness and of each optical layer, in terms of the design wavelength λ, is (0.08 to 1.31)×λ/4 in the first layer, is (0.17 to 0.36)×λ/4 in the second layer, is (0.45 to 0.91)×λ/4 in the third layer, is (0.15 to 0.33) × λ/4 in the fourth layer, and is (1.13 to 1.17)×λ/4 in the fifth layer.
KAWAMATA TAKESHI
WADA YORIO
DEGUCHI TAKESHI
TOYOHARA NOBUYOSHI
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