Title:
反射防止膜、該反射防止膜を有する光学素子及び光学系
Document Type and Number:
Japanese Patent JP4065530
Kind Code:
B2
Abstract:
An antireflection film includes alternately deposited high-refractive-index layers and low-refractive-index layers. The refractive indexes and extinction coefficients of the layers are such that the antireflection film exhibits sufficient antireflection characteristics even if the geometrical thickness thereof is small. An optical element having the antireflection film on a substrate exhibits high transmittance and has excellent optical characteristics.
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Inventors:
Kanazawa Hidehiro
Kenji Ando
Teranishi Koji
Kenji Ando
Teranishi Koji
Application Number:
JP2003066582A
Publication Date:
March 26, 2008
Filing Date:
March 12, 2003
Export Citation:
Assignee:
Canon Inc
International Classes:
G02B1/11; B32B7/02; G02B1/115
Domestic Patent References:
| JP2000352604A | ||||
| JP2002055212A | ||||
| JP7070749A | ||||
| JP6160602A |
Foreign References:
| WO2000058761A1 |
Attorney, Agent or Firm:
Keizo Nishiyama
Yuichi Uchio
Yuichi Uchio