Title:
APPARATUS AND DEVICE FOR VACUUM SUCKED TRANSFER WITH CHARGE NEUTRALIZING FUNCTION OF TRANSFERRED OBJECT
Document Type and Number:
Japanese Patent JP2000183132
Kind Code:
A
Abstract:
To provide an apparatus for vacuum sucked transfer equipped with charge neutralizing function, and its transfer method.
A vacuum sucked transfer apparatus has a vacuum sucking pad 10 which vacuum sucks an object WP to be transferred. Further, in a vacuum-destructing-air feeding systems 42, 44 and 46 for feeding to the vacuum suction pad pad 10 a vacuum destructing air, an ionizer 48 is provided to ionize the vacuum destructing air. When the vacuum sucking pad 10 releases the transferred object WP, the vacuum destructing ionized air is blown against the transferred object WP to neutralize and remove the charge of the transferred object WP.
Inventors:
HAMAYA TAKAHIRO
Application Number:
JP35492298A
Publication Date:
June 30, 2000
Filing Date:
December 14, 1998
Export Citation:
Assignee:
SONY CORP
International Classes:
H01L21/677; B25J15/06; H01L21/68; (IPC1-7): H01L21/68; B25J15/06