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Title:
APPARATUS FOR GROWING SEMICONDUCTOR SINGLE CRYSTAL
Document Type and Number:
Japanese Patent JPH07118091
Kind Code:
A
Abstract:

PURPOSE: To enable the extension of a seed moving stroke for pulling up a single crystal of length longer than heretofore with an apparatus for growing a semiconductor single crystal of a shaft system without having a cable winding up mechanism.

CONSTITUTION: A wire 2 supporting a seed holder 3 in balance is connected to the bottom end of a short force bar connected to a load cell 1 in the case of the growth device having a crystal weight type diameter control system. Three pieces of pulleys 7, 8, 9 which are freely movable in a horizontal direction are disposed on the right and left outer sides of bellows 6 enclosing the upper space of a chamber 5. The bellows 6 is compressed upward to horizontally move the pulleys 7, 8 toward the left until the pulleys come into contact with the wire 2 at the time of taking the single crystal 4 out of the furnace. The pulley 9 is moved further horizontally toward the left after the pulley comes into contact with the wire 2. As a result, a part of the wire 2 is pulled toward a transverse direction between the pulley 7 and the pulley 8 and the single crystal 4 is correspondingly pulled upward and, therefore, the single crystal of the size longer than heretofore is taken out.


Inventors:
TOMIOKA JUNSUKE
FUKUDA NOBUYUKI
Application Number:
JP28762193A
Publication Date:
May 09, 1995
Filing Date:
October 22, 1993
Export Citation:
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Assignee:
KOMATSU DENSHI KINZOKU KK
International Classes:
C30B15/24; H01L21/208; (IPC1-7): C30B15/24; H01L21/208